20 kV C60 Ion Gun System designed with fast pulsing capability for Time of Flight SIMS, chiefly aimed at
analysis of organic materials.
IOG C60-40
40 kV C60 Ion Beam System for ToF-SIMS applications requiring sub-micron spatial resolution and high
yields of organic secondary ions.
IOG C60-10
10 kV C60 Ion Gun System designed for low damage etching/profiling in XPS analysis and is available on
surface analysis tools from the Ulvac-Phi group.
Argon Cluster Ion Beam
GCIB 20
The GCIB 20 is an argon cluster ion beam system,
providing a selection of argon cluster sizes from 2
to over 2000 atoms with beam energy from 5 keV to
20 keV.
Duoplasmatron Ion Beams
The FLIG 5
The FLIG 5 is a low energy ion beam system for use on shallow profiling instruments to provide exceptional
depth resolution in SIMS analysis of shallow
interfaces.
It is also a powerful tool for fine polishing of
small areas.
IOG 5D
IOG 5D Duoplasmatron Ion Gun:
designed to produce a good probe shape with high
current density across a wide range of spot sizes.
It is suitable for both dynamic SIMS and imaging
SIMS applications.
Liquid Metal Ion Beams
IOG 25Ga
25 kV Gallium: Liquid Metal Ion Gun:
A microfocus ion gun, for pulsed (TOF-SIMS), or d.c.
operation.
The IOG 25Ga is a compact high performance Gallium
Ion Gun which provides wide current range, and high
spatial resolution.
IOG 25Au
25 kV Gold: Liquid Metal Ion Gun.
A microfocus ion gun, for pulsed (TOF-SIMS), or d.c.
operation.
The IOG 25Au is a compact high performance Gold
Ion Gun with Wien Filter which provides a wide
current range, and high spatial resolution.
